This study was how to control the mass flow controller in gas supplying system. The flow controller consists of piezoelectric material and sensor with heating wire. It is difficult to obtain accurate model, because MFC was composed of many parts, and the relationship between input and output of controller is nonlinear. The model for control was obtained by time constant and DC gain Based on this model, PID controller was applied to flow controller using DSP board. Also, the results were compared to controller using system identification.