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Theoretical and Experimental Analysis of Back-Gated SOI MOSFETs and Back-Floating NVRAMs
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  • Theoretical and Experimental Analysis of Back-Gated SOI MOSFETs and Back-Floating NVRAMs
  • Theoretical and Experimental Analysis of Back-Gated SOI MOSFETs and Back-Floating NVRAMs
저자명
Avci. Uygar,Kumar. Arvind,Tiwari. Sandip
간행물명
Journal of semiconductor technology and science
권/호정보
2004년|4권 1호|pp.18-26 (9 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Back-gated silicon-on-insulator MOSFET -a threshold-voltage adjustable device-employs a constant back-gate potential to terminate source-drain electric fields and to provide carrier confinement in the channel. This suppresses shortchannel effects of nano-scale and of high drain biases, while allowing a means to threshold voltage control. We report here a theoretical analysis of this geometry to identify its natural length scales, and correlate the theoretical results with experimental device measurements. We also analyze experimental electrical characteristics for misaligned back-gate geometries to evaluate the influence on transport behavior from the device electrostatics due to the structure and position of the back-gate. The backgate structure also operates as a floating-gate nonvolatile memory (NVRAM) when the back-gate is floating. We summarize experimental and theoretical results that show the nano-scale scaling advantages of this structure over the traditional front floating-gate NVRAM.