- Inter-Bay 물류 흐름을 고려한 반도체 Fab의 Unload 및 Load Request Logic 개발
- ㆍ 저자명
- 서정대,구평회,장재진,Suh. Jung-Dae,Koo. Pyung-Hoi,Jang. Jae-Jin
- ㆍ 간행물명
- 산업공학
- ㆍ 권/호정보
- 2004년|17권 |pp.131-140 (10 pages)
- ㆍ 발행정보
- 대한산업공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The purpose of this paper is to develop and show the efficiency of the URL(Unload Request Logic) and LRL(Load Request Logic) of the dispatcher in the Fab(Fabrication) Manufacturing Execution System. These logics are the core procedures which control the material(wafer and glass substrate) flow efficiently in the semiconductor and LCD fab considering inter-bay as well as intra-bay material flow. We use the present and future status information of the system by look-ahead and the information about the future transportation schedule of Automated Guided Vehicles. The simulation results show that the URL and LRL presented in this paper reduce the average lead time, average and maximum WIP level, and the average available AGV waiting time.