In-process diagnosis is essential to achieve predictive maintenance in industrial plants. An in- process diagnosis method was proposed for hydraulic servo systems, which was based upon leakage flow measurement. Leakage due to servovalve wear was analysed and modeled mathematically far computer simulation work. The key idea of diagnosis algorithm is that when monitoring signals, such as servovalve input and load displacement are in steady states, the return-line flow of hydraulic servo systems can be regarded as null-leakage of servovalve. Virtual experiments were performed to ensure effectiveness of the proposed diagnosis method.