The effects of adiabatic flame temperature and mass flux on deuterium fluoride(DF) chemical laser performance were investigated. The power flux and specific power, which are important parameters containing the information of scaling effects of laser device magnitude, and chemical efficiency were selected as a judging parameter of DF laser performance. For the specific power, it was decreased by the increase of power flux of DF laser. Higher the adiabatic flame temperature of atomic fluorine generator, higher the chemical efficiency of DF laser was changed. It seems that the mass flux effect on the chemical efficiency is not remarkable.