- 전도성 볼을 이용한 진동센서의 제작 및 특성
- ㆍ 저자명
- 장성욱,조용수,공성호,최시영,Jang. Sung-Wook,Cho. Yong-Soo,Kong. Seong-Ho,Choi. Sie-Young
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2005년|14권 6호|pp.374-380 (7 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Vibration sensors have a wide scope of applications in the field of monitoring systems that needs to perceive an undesirable physical vibration before a critical failure occurs in a system, and then costly unplanned repairs can be avoided. The conventional vibration sensors developed so far have many disadvantages, such as complex manufacturing process, bulkiness, high cost, less reliability and so on. This paper reports a simple-structured vibration sensor, which has been developed using a commercialized conductive ball and silicon bulk-micromachining technology. The sensor consists of a conductive ball placed in $600{mu}m$-deep micromachined silicon groove, in which Au thin film has been patterned using a shadow mask technique. Prior to the formation of the Au thin film, the sharp convex corner was rounded for smooth meatl deposition on the non-planar surface at the edge of the groove. The measurement results of the fabricated vibration sensor demonstrate a stable response characteristic to low-frequency vibration range ($1{sim}30{;}Hz$).