- R.F. Magnetron Sputtering 법을 이용한 SnO2 박막 센서의 제조 및 알콜 감도 특성
- ㆍ 저자명
- 박상현,강주현,유광수,Park. Sang-Hyoun,Kang. Ju-Hyun,Yoo. Kwang-Soo
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2005년|14권 2호|pp.63-68 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The nano-grained Pd or Pt-doped $SnO_{2}$ thin films were deposited on the alumina substrate at ambient temperature or $300^{circ}C$ by using an R.F. magnetron sputtering system and then annealed at $650^{cir}C$ for 1 hour or 4 hours in air. The crystallinity and microstructure of the annealed films were analyzed. A grain size of the thin films was 30 nm to 50 nm. As a result of gas sensitivity measurements to an alcohol vapor of $36^{circ}C$, the 2 wt.% Pt-doped $SnO_{2}$ thin-film sensor deposited at $300^{circ}C$ and annealed at $650^{circ}C$ for 4 hours showed the highest sensitivity.