- 기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성 (I)
- ㆍ 저자명
- 이재달,홍영기,노덕길,배기서,Lee. Jae-Dal,Hong. Young-Ki,Ro. Duck-Kil,Bae. Kie-Seo
- ㆍ 간행물명
- 韓國染色加工學會誌
- ㆍ 권/호정보
- 2005년|17권 3호|pp.34-42 (9 pages)
- ㆍ 발행정보
- 한국염색가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this work, a practical separation performance was investigated on aqueous alcohol solutions, especially for iso-propyl alcohol (IPA), which is usually used during the semi- conductor rinsing process. The removal of various substances from waste aqueous IPA solutions was carried out by microfiltration with $0.1~1{mu}$m pore size of mean diameter as a pre-filter. Permeability and molecular weight cut-off of the functional polysulfone(PSf) ultrafiltration membrane to purify waste aqueous IPA solutions were measured through the ultrafiltration test. The solute rejection of PSf membrane had $92\%$ in 1,000ppm aqueous PEG solution with PEG molecular weight 10,000, the molecular weight cut-off had 10,000. The IPA concentration on the $CMPA-K^+$ membrane performance using pervaporation module system could be increased from $95.04 wt\%$ to more than $98.50wt\%$ in about 9hr at operation temperature of $70^{circ}C$ using the pervaporation module system.