- Ge2Sb2Te5 박막의 상변화에 의한 기계적 물성 변화
- ㆍ 저자명
- 홍성덕,정성민,김성순,이홍림,Hong. Sung-Duk,Jeong. Seong-Min,Kim. Sung-Soon,Lee. Hong-Lim
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2005년|42권 5호|pp.326-332 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Phase transformation effects on mechanical properties of $Ge_2Sb_2Te_5$, which is a promising candidate material for Phase Change Random Access Memory (PRAM), were studied. $Ge_2Sb_2Te_5$ thin films, which was thermally annealed with different conditions, were analyzed using XRD, AFM, 4-point probe method and reflectance measurement. As the temperature and the dwelling time increased, crystallity and grain size increased, which enhanced elastic modulus and hardness. Furthermore, N2 doping, which was used for better electrical properties, was proved to decrease elastic modulus and hardness of $Ge_2Sb_2Te_5$.