- 게이트와 드리프트 영역 오버랩 길이에 따른 LDMOST 전력 소자의 전기적 특성
- ㆍ 저자명
- 하종봉,나기열,조경록,김영석,Ha. Jong-Bong,Na. Kee-Yeol,Cho. Kyoung-Rok,Kim. Yeong-Seuk
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2005년|18권 7호|pp.667-674 (8 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper the gate overlap length of the LDMOST is optimized for obtaining longer device lifetime. The LDMOSI device with drift region is fabricated using the $0.25;{mu}m$ CMOS Process. The gate overlap lengths on drift region are $0.1;{mu}m,;0.4;{mu}m;0.8;{mu}m;and;1.1;{mu}m$, respectively. The breakdown voltages, on-resistances and hot-carrier degradations of the fabricated LDMOST devices are characterized. The LDMOST device with gate overlap length of $0.4;{mu}m$ showed the longest on-resistance lifetime, 0.02 years and breakdown voltage of 22 V and on-resistance of $23;mOmega{cdot}mm^2$.