- 와이어 본더 시스템의 Z축 표면 접촉 검출 알고리듬 개발
- ㆍ 저자명
- 김정한,Kim. Jung-Han
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2005년|22권 7호|pp.137-145 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A new design of contact detection algorithm is proposed for the z-axis of a wire bonder that interconnects between pads and leads in semiconductor manufacturing processes. Fast and stable contact detection of the z-axis is extremely important fer maintaining proper quality in the fine pitch gold wire bonding process, which has a small pad size of below 70um. The new method is based on a statistical approach and designed for the discrete Kalman filter. Real wire bonding experimental results are presented to demonstrate the advantages of the proposed algorithm.