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Fabrication of Electrochemical Sensor with Tunable Electrode Distance
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  • Fabrication of Electrochemical Sensor with Tunable Electrode Distance
  • Fabrication of Electrochemical Sensor with Tunable Electrode Distance
저자명
Yi. Yu-Heon,Park. Je-Kyun
간행물명
Journal of semiconductor technology and science
권/호정보
2005년|5권 1호|pp.30-37 (8 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{mu}m;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.