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A Study on the Design and Characteristics of thin-film L-C Band Pass Filter
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  • A Study on the Design and Characteristics of thin-film L-C Band Pass Filter
  • A Study on the Design and Characteristics of thin-film L-C Band Pass Filter
저자명
Kim. In-Sung,Song. Jae-Sung,Min. Bok-Ki,Lee. Won-Jae,Muller. Alexandru
간행물명
KIEE international transactions on electrophysics and applications
권/호정보
2005년|4호|pp.176-179 (4 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

The increasing demand for high density packaging technologies and the evolution to mixed digital and analogue devices has been the con-set of increasing research in thin film multi-layer technologies such as the passive components integration technology. In this paper, Cu and TaO thin film with RF sputtering was deposited for spiral inductor and MOM capacitor on the $SiO_2$/Si(100) substrate. MOM capacitor and spiral inductor were fabricated for L-C band pass filter by sputtering and lift-off. We are analyzed and designed thin films L-C passive components for band pass filter at 900 MHz and 1.8 GHz, important devices for mobile communication system. Based on the high-Q values of passive components, MOM capacitor and spiral inductors for L-C band pass filter, a low insertion loss of L-C passive components can be realized with a minimized chip area. The insertion loss was 3 dB for a 1.8 GHz filter, and 5 dB for a 900 MHz filter. This paper also discusses a analysis and practical design to thin-film L-C band pass filter.