- 원통형 ICP 광원 모드변환의 안테나 의존성
- ㆍ 저자명
- 양종경,백광현,이종찬,박대희,윤양웅,Yang. Jong-Kyung,Pack. Gewnag-Hyeon,Lee. Jong-Chan,Park. Dae-Hee,Yoon. Yang-Woung
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2005년|18권 8호|pp.772-778 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we designed the cylindrical type light source that had a electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with $0.3~1.2;mm{Phi}$, number of turns with $4~12$ turns, distance with $40~120$ mm and RF power with $10~150$ W, the electrical and optical properties were measured. When diameter of coil was $0.3;mm{Phi}$, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730 $cd/m^2$ was shown with RF power 150 W. The relationship between electromagnetic induction and plasma discharges was shown by mode transition from E-mode to H-mode.