- 연마가공감시를 위한 AE와 연마파라미터의 관계
- ㆍ 저자명
- 김화영,김정욱,윤항묵,안중환,김성렬,Kim. Hwa-Young,Kim. Jeong-Uk,Yoon. Hang-Mook,Ahn. Jung-Hwan,Kim. Sung-Ryul
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2005년|22권 10호|pp.90-98 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A monitoring system is necessary to make the polishing process more reliable in order to ensure the high quality and performance of the final products. Generally, AE (Acoustic Emission) is known to be closely related to the material removal rate (MRR). As the surface becomes rougher, the MRR and AE increase. Therefore, the surface roughness can be indirectly estimated using the AE signal measured during the polishing. In this study, an AE sensor-based monitoring system was fabricated to detect the very small AE signal resulting from the friction between a tool and a workpiece during polishing. The performance of this monitoring system was estimated according to polishing conditions, the relation between the level of the AE RMS and the surface roughness during the polishing was investigated.