The Berkovich nano-indentation is an indentation test method analyzing mechanical properties of materials such as hardness and elastic modulus. The length scale of the penetration is measured in nanometers. Therefore, this method becomes widely useful for analyzing the mechanical property of thin film which can not be measured before. In this paper, comparing two results of the load-displacement curve obtained by the Berkovich nano-indentation and the 3-D finite element analysis, it was confirmed that the 3-D finite element analysis is useful. The phenomenon of pile-up and sink-in due to material properties was discussed by the finite element analysis.