- 튜닝포크형 미소 캔틸레버 센서의 주파수 특성
- ㆍ 저자명
- 김충현,안효석,Kim. Choong Hyun,Ahn. Hyo-Sok
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2005년|14권 5호|pp.35-40 (6 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.