- 패턴드 미디어를 위한 나노 사출 성형 공정에 관한 연구
- ㆍ 저자명
- 이남석,최용,강신일,Lee. Nam-Seok,Choi. Yong,Kang. Shin-Ill
- ㆍ 간행물명
- 소성가공
- ㆍ 권/호정보
- 2005년|14권 7호|pp.624-627 (4 pages)
- ㆍ 발행정보
- 한국소성가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by I-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50nm in diameter, 150nm in pitch, and 50nm in depth.