The ($Sr_{1-x}Ca_{x})Ti_{3}$(SCT) thin film are deposited on Pt-coated electrode (Pt/TiN/$SiO_{2}$/Si) using RF sputtering method. The maximum dielectric constant of SCT thin film is obtained by annealing at 600[$^{circ}C$]. The temperature properties of the dielectric loss have a value within 0.02 in temperature lunges of -80 $∼$ +90[$^{circ}C$]). The capacitance characteristics had a stable value within ${pm}4\%$. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 200[kHz).