Periodic structures can be applied as a MEMS(micro-electro-mechanical system) sensor or actuator due to low energy loss and wideband frequency response. The dynamic behavior of a mistuned periodic structure Is dramatically changed from that of a perfectly tuned periodic structure. The effects of mistuning, coupling stiffness, and driving point on the forced vibration responses of a simple periodic structure ate investigate4 through numerical simulations. On the basis of that, one can design effective and reliable MEMS components using periodic structures.