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A Two-Step Micromirror for Low Voltage Operation
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  • A Two-Step Micromirror for Low Voltage Operation
  • A Two-Step Micromirror for Low Voltage Operation
저자명
Hwang. Yong-Ha,Han. Seungoh,Lee. Byung-Kab,Kim. Jae-Soon,Pak. James Jungho
간행물명
KIEE international transactions on electrophysics and applications
권/호정보
2005년|6호|pp.270-275 (6 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In order for the application of the in-vivo endoscopic biopsy, a micromirror which can be driven at a low voltage is required. In this paper, a two-step micromirror composed of bottom electrodes, moving plate and top mirror plate is proposed. Because an electrical wiring of two plates are separated, they can be actuated separately. Therefore, an intermediate moving plate plays an important role in reducing the driving voltage in half. The designed device was fabricated by the surface micromachining. Maximum rotation angle of $6.3^{circ}$ was obtained by applying DC 48V, while a conventional one-step mirror pulled down at DC 120V. The designed structure can be used in microphotonic applications requiring low driving voltage.