Perpendicular magnetization curves and crystal textures of [Pd(0.8 nm)/Co(0.8 nm)]₅/FeMn multilayers having an exchange-biased perpendicular magnetic anisotropy as a function of FeMn thickness and annealing temperature were measured. As FeMn thickness increases from 0 to 21 nm, the perpendicular exchange biasing field (H_ex) obtained the maximum value of 130 Oe at FeMn thickness 12 nm. As the annealing temperature increases to 240℃, the H_ex increased from 115 Oe to 190 Oe and the exchange-biased perpendicular magnetic anisotropy disappeared at 330℃.