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Crystallization and Electrical Properties of SBN60 Thin Films Prepared by Ion Beam Sputter Deposition
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  • Crystallization and Electrical Properties of SBN60 Thin Films Prepared by Ion Beam Sputter Deposition
  • Crystallization and Electrical Properties of SBN60 Thin Films Prepared by Ion Beam Sputter Deposition
저자명
Jang. Jae-Hoon,Jeong. Seong-Won,Lee. Hee-Young
간행물명
Transactions on electrical and electronic materials
권/호정보
2005년|6권 1호|pp.10-13 (4 pages)
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한국전기전자재료학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

$Sr_{0.6}Ba_{0.4}Nb_{2}O_{6}$, hereafter SBN60, thin films of 300 nm thickness were deposited using ion beam sputtering technique, in which sintered ceramic target of the same composition was utilized and the $Ar:O_{2}$ gas ratio was controlled during deposition onto $Pt(100)/TiO_{2}/SiO_{2}/Si$ substrate. Crystallization and orientation behavior as well as electrical properties of the films were examined after annealing treatment at $650{sim}800{cric}C$. It was found that the film orientation was dependent upon $Ar:O_{2}$ratio, in which strong (00l) orientation was developed when the gas ratio was about 1:4 at $4.3{ imes}10^{-4}$ torr. Typical remanent polarization (2Pr), the coercive field (Ec) and the dielectric constant of Pt/SBN60/Pt thin film capacitor were approximately $10{mu}C/cm^{2}$, 60 kV/cm, and 615, respectively.