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Device Characteristics of AlGaN/GaN MIS-HFET using $Al_2O_3$ Based High-k Dielectric
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  • Device Characteristics of AlGaN/GaN MIS-HFET using $Al_2O_3$ Based High-k Dielectric
  • Device Characteristics of AlGaN/GaN MIS-HFET using $Al_2O_3$ Based High-k Dielectric
저자명
Park. Ki-Yeol,Cho. Hyun-Ick,Lee. Eun-Jin,Hahm. Sung-Ho,Lee. Jung-Hee
간행물명
Journal of semiconductor technology and science
권/호정보
2005년|5권 2호|pp.107-112 (6 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We present an AlGaN/GaN metal-insulator-semiconductor-heterostructure field effect transistor (MIS-HFET) with an $Al_2O_3-HfO_2$ laminated high-k dielectric, deposited by plasma enhanced atomic layer deposition (PEALD). Based on capacitance-voltage measurements, the dielectric constant of the deposited $Al_2O_3-HfO_2$ laminated layer was estimated to be as high as 15. The fabricated MIS-HFET with a gate length of 102 m exhibited a maximum drain current of 500 mA/mm and maximum tr-ansconductance of 125 mS/mm. The gate leakage current was at least 4 orders of magnitude lower than that of the reference HFET. The pulsed current-voltage curve revealed that the $Al_2O_3-HfO_2$ laminated dielectric effectively passivated the surface of the device.