- 주문형 반도체 웨이퍼 공정분석을 위한 시뮬레이션 연구
- ㆍ 저자명
- 김기영,이정호,강창호,김갑환,Kim. Ki-Young,Lee. Jung-Ho,Kang. Chang-Ho,Kim. Kap-Hwan
- ㆍ 간행물명
- 산업공학
- ㆍ 권/호정보
- 2005년|18권 1호|pp.22-34 (13 pages)
- ㆍ 발행정보
- 대한산업공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper introduces a simulation model which is based on the process analysis of a semiconductor company. The objective of the simulation modelis not only to estimate the overall performancesof the company but also to evaluate the performances of various operation rules for shop floor control. First, in order to develop the simulation model, a time study is performed for each process after analyzing the processes for the company. Second, by using ARENA, a simulation model is constructed based on the process analysis and the time study. After the simulation model is tested and run, its results are discussed.