- 진공증착법으로 제조한 In2O3 나노벨트막의 NO가스감지특성
- ㆍ 저자명
- 최무희,마대영,Choi. Mu-Hee,Ma. Tae-Young
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2006년|15권 6호|pp.406-410 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The films of indium oxide $In_{2}O_{3}$) were deposited onto $SiO_{2}$ coated Si wafers by a thermal evaporation method. Substrate temperature was varied from $25^{circ}C$ to $300^{circ}C$. Deposition rate increased to $250^{circ}C$ and then decreased rapidly. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The films deposited at $250^{circ}C$ were found to have a nanobelt structure. Resistor-type gas-sensors were fabricated with $In_{2}O_{3}$ films using Pt as electrodes. The resistance variation of $In_{2}O_{3}$ films with the concentration of NO gas was measured. The $In_{2}O_{3}$ films deposited at $250^{circ}C$ showed the highest sensitivity to the NO gas.