- 다공질규소를 이용한 MOPS 구조의 에탄올 감지 특성
- ㆍ 저자명
- 손신영,김한중,이기원,김영유,Sohn. Sihn-Young,Kim. Han-Jung,Lee. Ki-Won,Kim. Young-You
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2006년|15권 6호|pp.457-461 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
To use the porous silicon as gas sensors, we made the MOPS structure from the porous silicon with Al evaporation and investigated the sensing characteristic of ethanol. When the MOPS structure is in contact with ethanol gas, the maximum peak of PL changes and it return to original intensity without contact. The MOPS structure had response time 0.78s and recovery time 4.13s when it is in contact with ethanol, which satisfied the required sensor standards. Further complimentary researches, however, are required to investigate the contact mechanism between MOPS structure and ethanol and to solve the surface contamination problem.