- 패턴이 형성된 탄소나노튜브 매트의 이산화질소 감응 특성
- ㆍ 저자명
- 조우성,문승일,백경갑,박정호,주병권,Cho. Woo-Sung,Moon. Seung-Il,Paek. Kyeong-Kap,Park. Jung-Ho,Ju. Byeong-Kwon
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2006년|15권 3호|pp.199-204 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide ($NO_{2}$) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to $NO_{2}$. All sensors exhibited a reversible response at a thermal treatment temperature of $130^{circ}C$ for about 5 minutes. The resistance change to $NO_{2}$ of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.