- 버클링 마이크로 적층형 압전밸브의 제작
- ㆍ 저자명
- 이종화,정귀상,Lee. Jong-Hwa,Chung. Gwiy-Sang
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2006년|15권 1호|pp.47-52 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{ imes}10^{-8};Pa{cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.