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양성자 조사법에 의한 PT-IGBT의 Turn-off 스위칭 특성 개선
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  • 양성자 조사법에 의한 PT-IGBT의 Turn-off 스위칭 특성 개선
저자명
최성환,이용현,권영규,배영호,Choi. Sung-Hwan,Lee. Yong-Hyun,Kwon. Young-Kyu,Bae. Young-Ho
간행물명
전기전자재료학회논문지
권/호정보
2006년|19권 12호|pp.1073-1077 (5 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Proton irradiation technology was used for improvement of switching characteristics of the PT-IGBT. Proton irradiation was carried out at 5.56 MeV energy with $1{ imes}10^{12}/cm^2$ doze from the back side of the wafer. The I-V, breakdown voltage, and turn-off delay time of the device were analyzed and compared with those of un-irradiated device and e-beam irradiated device which was conventional method for minority carrier lifetime reduction. For proton irradiated device, the breakdown voltage and the on-state voltage were 733 V and 1.85 V which were originally 749 V and 1.25 V, respectively. The turn-off time has been reduced to 170 ns, which was originally $6{mu}s$ for the un-irradiated device. The proton irradiated device was superior to e-beam irradiated device for the breakdown voltage and the on-state voltage which were 698 V and 1.95 V, respectively, nevertheless turn-off time of proton irradiated device was reduced to about 60 % compared to that of the e-beam irradiated device.