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Pb(Zr0.7Ti0.3)O3 후막의 강유전 특성에 전구체 용액의 코팅요소가 미치는 영향
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  • Pb(Zr0.7Ti0.3)O3 후막의 강유전 특성에 전구체 용액의 코팅요소가 미치는 영향
저자명
박상만,윤상은,이성갑,Park. Sang-Man,Yun. Sang-Eun,Lee. Sung-Gap
간행물명
전기전자재료학회논문지
권/호정보
2006년|19권 12호|pp.1092-1098 (7 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The influence of the concentration of precursor solution and the number of solution coatings on the densification of the $Pb(Zr_xTi_{1-x})O_3$ (PZT) thick films was studied. PZT powder and PZT precursor solution were prepared by3 sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The composition of powder and precursor solution were PZT(70/30) and PZT(30/70), respectively. The PZT precursor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 to 2.0 mol/L[M] and the number of coating was repeated from 0 to 6. The XRD patterns of all PZT thick films shelved typical perovskite polycrystalline structure. The porosity of the thick films was decreased with increasing the number of coatings and 6-time coated films with 1.5 M showed the dense microstructure and thickness of about $60{mu}m$. The relative dielectric constant of the PZT thick film was increased with increasing the number of solution coatings and the thick films with 1.5 M, 6-time coated showed the 698. The remanent polarization the 1.5 M and 6-time coated PZT thick films was $38.3{mu}C/cm^2$.