- PLD 법으로 제작된 PLZT 박막의 산소압에 따른 구조 및 전기적 특성
- ㆍ 저자명
- 장낙원,Jang. Nak-Won
- ㆍ 간행물명
- 한국마린엔지니어링학회지
- ㆍ 권/호정보
- 2006년|30권 8호|pp.927-933 (7 pages)
- ㆍ 발행정보
- 한국마린엔지니어링학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The structural and electrical characteristics of PLZT thin films fabricated onto $Pt/IrO_2/Ir/Ti/SiO_2/Si$ substrates by a pulsed laser deposition were investigated to develop the high dielectric thin films for capacitor layer of semiconductor memory devices The slim region 14/50/50 PLZT thin films were fabricated by PLD and estimated the characteristics for memory application 14/50/50 PLZT thin films have crystallize into perovskite structure at the $600^{circ}C$ deposition temperature, 200 mTorr of oxygen pressure, and 2 $J/cm^2$ of laser energy density. In this condition PLZT thin films had the dielectric constant as high as 985, storage charge density 8.17 ${mu}C/cm^2$ and charging time 0.20 ns. Leakage current density was less than $10^{-10}A/cm^2$ up to 5 V bias voltage.