Plasma treatment has been increasingly used for surface cleaning and polymerization in many industries. In this study, inductively coupled plasma (ICP) treatment is used to remove organic residuals, mainly silicon oils from nylon66/spandex fabrics. The removed silicone oils from the fabrics are characterized using scanning electron microscopy. EDX and XPS are also used for determination of the change in elements on the fiber surface. It is shown that lower energy plasma treatment with longer plasma operating time Performs the best in removal of the silicon oils from the fabrics. On the contrary, increasing the energy input enhances the ion damage and yields high heat loads on the fiber surface. Meanwhile, ICP treatment for removing silicon oils is almost same as wet chemical cleaning method in terms of efficiency.