- 기판접합기술을 이용한 MEMS 컨덴서 마이크로폰의 설계와 제작
- ㆍ 저자명
- 권휴상,이광철,Kwon. Hyu-Sang,Lee. Kwang-Cheol
- ㆍ 간행물명
- 한국소음진동공학회논문집
- ㆍ 권/호정보
- 2006년|16권 12호|pp.1272-1278 (7 pages)
- ㆍ 발행정보
- 한국소음진동공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{ imes}2.5mm$, 0.5${mu}m$ thick low stress silicon nitride membrane, $2mm{ imes}2mm$ Au/Ni/Cr membrane electrode, and 3${mu}m$ thick Au/Sn layer. The backplate chip has $2mm{ imes}2mm$, 150${mu}m$ thick single crystal silicon rigid backplate, $1.8mm{ imes}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{sim}60{mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.