- 구리 전해도금 시 표면형상과 기계적 특성에 미치는 HEC효과
- ㆍ 저자명
- 우태규,박일송,이현우,설경원,Woo. Tae-Gyu,Park. Il-Song,Lee. Hyun-Woo,Seol. Kyeong-Won
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2006년|16권 11호|pp.710-714 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The purpose of this study is to identify the effect of additives and composition on copper surface morphology and mechanical characteristics by copper electrodeposition. Additives such as hydroxy ethyl cellulose(HEC), chloride ion were used in this study. Electrochemical experiments allied to SEM, XRD, AFM and four- point probe were performed to characterize the morphology and mechanical characters of copper in the presence of additives. Among various electrodeposition conditions, the minimum surface roughness of copper foil was obtained when electrodeposited at the current density of 200 mA/$cm^2$ for 68 seconds with 2 ppm of HEC. The minimum value of surface roughness(Rms) was 107.6 nm. It is copper foil is good for electromigration inhibition due to preferential crystal growth of Cu (111) deposited in the electrolyte containing chloride ions(10 ppm) and HEC(1 ppm).