- Lead-Frame 에칭공정에서 몬테카를로 시뮬레이션을 이용한 에칭특성 예측
- ㆍ 저자명
- 정흥철,최경민,김덕줄,Jeong. Heung-Cheol,Choi. Gyung-Min,Kim. Duck-Jool
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2006년|23권 1호|pp.72-79 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The objective of this work is to simulate the etching characteristics for the optimization on the etching process of Lead-Frame. The etching characteristics such as etching factor, etching uniformity were investigated under different the actual operating conditions. The correlation between the etching characteristics and the spray ones were analyzed to simulate the etching characteristics in the etching process. To improve the etching characteristics in the etching process, effects of the various operating conditions such as pressure, distance from nozzle tip, pipe pitch, and feed speed should be understood in detail. The spray characteristics obtained by experiment using PDA system were simulated by the Monte-Carlo simulation. The etching process model was coded by Java language. It was found that the spray characteristics were correlated with the etching ones and simulation results generally agreed well with the measured results of etching characteristics in the etching process of Lead-Frame. The optimal operating parameters were successfully found under variable conditions.