기관회원 [로그인]
소속기관에서 받은 아이디, 비밀번호를 입력해 주세요.
개인회원 [로그인]

비회원 구매시 입력하신 핸드폰번호를 입력해 주세요.
본인 인증 후 구매내역을 확인하실 수 있습니다.

회원가입
서지반출
Pre-Annealing Effect of Electroless Ni-B Deposit as a Diffusion Barrier for Electroplated Cu Electrodes
[STEP1]서지반출 형식 선택
파일형식
@
서지도구
SNS
기타
[STEP2]서지반출 정보 선택
  • 제목
  • URL
돌아가기
확인
취소
  • Pre-Annealing Effect of Electroless Ni-B Deposit as a Diffusion Barrier for Electroplated Cu Electrodes
  • Pre-Annealing Effect of Electroless Ni-B Deposit as a Diffusion Barrier for Electroplated Cu Electrodes
저자명
Choi. Jae Woong,Hwang. Gil Ho,Han. Won Kyu,Kang. Sung Goon
간행물명
Metals and materials international
권/호정보
2006년|12권 1호|pp.75-80 (6 pages)
발행정보
대한금속재료학회
파일정보
정기간행물|ENG|
PDF텍스트
주제분야
기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Ni-B film of $1{mu}m$ thickness was electrolessly deposited on an electroplated Cu bus electrode. The film, which encapsulates the Cu bus electrodes, prevents Cu oxidation and serves as a diffusion barrier against Cu contamination of the transparent dielectric layer in a plasma display during the firing process at $580^{circ}C$. The microstructure of the as-deposited barrier film was amorphous phase and crystallized to Ni and $Ni_3B$ after annealing at $300^{circ}C$. The good barrier properties observed here can be explained by $Ni_3B$ precipitates at the grain boundaries acting as a fast diffusion path via pre-annealing at $300^{circ}C$ before the firing process at $580^{circ}C$.