Ordered nanostructure materials have received attention due to their unique physical properties and potential applications in electronics, mechanics and optical devices. To actualize most of the proposed applications, it is quite important to obtain highly ordered nanostructure arrays. The well-aligned nanostructure can be achieved by synthesizing nanostructure material in the highly ordered template. To get well-aligned pore array and reduce process time, rapid thermal anneal by an IR lamp was employed in vacuum state at $500^{circ}C$ for 2 hour. The pore array is comparable to a template annealed in vacuum furnace at $500^{circ}C$ for 30 hours. The well-fabricated AAO template has the mean pore diameter of 70 nm, the barrier layer thickness of 25 nm, the pore depth of $9{mu}m$, and the pore density of higher than $1.2{ imes}10^{10}cm^{-2}$.