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저전압 대회전을 위한 분리된 압전 구동기에 의한 미소거울
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  • 저전압 대회전을 위한 분리된 압전 구동기에 의한 미소거울
저자명
김성진,진영현,이원철,남효진,부종욱,조영호,Kim. Sung-Jin,Jin. Young-Hyun,Lee. Won-Chul,Nam. Hyo-Jin,Bu. Jong-Uk,Cho. Young-Ho
간행물명
전기학회논문지. The transactions of the Korean Institute of Electrical Engineers. C/ C, 전기물성·응용부문
권/호정보
2006년|55권 3호|pp.149-155 (7 pages)
발행정보
대한전기학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{circ}$ and $4.7^{circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1pm0.1$ kHz in x-axis and $1.7pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.