Independent component analysis (ICA) is a statistical method for transforming an observed high-dimensional multivariate data into statistically independent components. ICA has been applied increasingly in wide fields of spectrum application since ICA is able to extract unknown components of a mixture from spectra. We focus on application of ICA for separating independent sources and predicting each composition using extracted components. The theory of ICA is introduced and an application to a metal surface spectra data will be described, where subsequent analysis using non-negative least square method is performed to predict composition ratio of each sample. Furthermore, some simulation experiments are performed to demonstrate the performance of the proposed approach.