Pneumatic control systems have been mainly used as a high speed operating system. Therefore, state change of air in a control volume was assumed to be adiabatic change and, pneumatic control systems have been analyzed by using this assumption. Especially, when absolute value of pressure change in the control volume is small, there is a tendency to neglect effect of temperature change on pneumatic control system because temperature change owing to pressure change is small. In this study, an effect of temperature change of air on the decompression control process was analyzed by considering change of mass flow rate, and heat transfer characteristics between air in the chamber and the chamber wall. As a result, this study could confirm that a slight temperature change of the air in the pneumatic pressure control system can influence on the dynamic characteristics of pressure response, and pressure control performance.