- 스퍼터링 조건이 티탄산화물박막의 전기적 착색 특성에 미치는 영향
- ㆍ 저자명
- 이길동,Lee. Kil-Dong
- ㆍ 간행물명
- 한국태양에너지학회 논문집
- ㆍ 권/호정보
- 2006년|26권 4호|pp.55-61 (7 pages)
- ㆍ 발행정보
- 한국태양에너지학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Titanium oxide ($TiO_2$) films are deposited on the indium tin oxide (ITO) substrate in an $Ar/O_2$ atmosphere by using reactive RF (Radio Frequency) magnetron sputtering technique, and Electrochromic properties and durability of $TiO_2$ films deposited at different preparation conditions are investigated by using UV-VIS spectrophotometer and cyclic voltammetry Li+ interalation/deintercalation in $TiO_2$ films shows that the electrochromic properties and durability of as-deposited films strongly depend on gas pressure $TiO_2$ films formed in our sputtering conditions are found to remain transparent, irrespective of their Li+ ion contents. The optimum sputtering conditions for film as passive counter electrode in electrochromic devices are working pressure of $1.0;{ imes};10^{-2};torr$ and oxygen flow raes of $10{sim}15;sccm$, respectively