The machining parts must be produced within the specification of drawing and those will be able to meet function and efficiency. At that time, it is very important not only precision machine and machining technique but also the measurement technique. So, the improvement of measurement technique is to be joined together at once with improvement of machining technique. Finally, the quality and value of the parts are decided by precision measurement. This paper aims to study on the machined surfaces characteristics of aluminum alloy by AFM(Atomic force microscope) measurement. The objective is contribution to ultra-precision machining by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.