- 박막펌핑을 이용한 Nano Fountain-Pen의 유동 특성에 관한 수치적 연구
- ㆍ 저자명
- 이진형,이영관,이석한,김훈모,김윤제,Lee. J.H.,Lee. Y.K.,Lee. S.H.,Kim. Hun-Mo,Kim. Youn-J.
- ㆍ 간행물명
- 유체기계저널
- ㆍ 권/호정보
- 2006년|9권 2호|pp.19-24 (6 pages)
- ㆍ 발행정보
- 유체기계공업학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction of patterns and surface variation in the micro process. In this study, nuo fountain-pen is composed with reservoir, micro channels, tip and scondary chamber. Instead of traditional method only using capillary force, liquid can be definitely and exactly injected with membrane pumping by the repulse force of tip. It is dfficult to perform experiments in the micro range so that we carried out a numerical analysis for internal flow, using a commercial code, FlUENT, The velocity, pressure and flow rate are obtained under laminar, unsteady, three-dimensional incompressible flow with no-slip condition, and results are graphically described.