- 실리콘 연삭력에 관한 연구
- ㆍ 저자명
- 이충석,채승수,김종표,이종찬,최환,Lee. Choong-Seok,Chae. Seung-Su,Kim. Jong-Pyo,Lee. Jong-Chan,Choi. Hwan
- ㆍ 간행물명
- 한국기계가공학회지
- ㆍ 권/호정보
- 2006년|5권 1호|pp.33-38 (6 pages)
- ㆍ 발행정보
- 한국기계가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Silicon has been widely used in electronic parts as a semiconductor equipment. It, however, requires much effort to grind without microcrack and chipping because of its high hardness and brittleness. So far, many studies for the grinding of engineering ceramics have been done, but not for the grinding of silicon. In this paper, a theoretical analysis on the grinding forces is introduced. Grinding experiments were performed at various grinding conditions including grinding directions (Up grinding and Down grinding), table speeds and depth of cuts. The grinding forces were measured to compare at various grinding conditions. The experimental values agree well with theoretical ones.