- R.F magnetron sputtering법으로 제조된 TiAlN 코팅 층의 열처리 특성
- ㆍ 저자명
- 송동환,양권승,이종국,Song. Dong Hwan,Yang. Gwon Seung,Lee. Jong Kook
- ㆍ 간행물명
- 열처리공학회지
- ㆍ 권/호정보
- 2006년|19권 4호|pp.225-229 (5 pages)
- ㆍ 발행정보
- 한국열처리공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
TiAlN coatings are available in various industry fields as a wear resistant coating for high-speed machining, due to its high hardness, excellent oxidation and corrosion resistance. The corrosion resistance of TiAlN multilayer coatings is better than that of single TiN coatings. Most of TiAlN coated layers were formed by heat treatment of coating layers with a non-stoichiometric $Ti_xAl_{1-x}N$. In this study, TiAlN coated layer was prepared by R.F magnetron sputtering and investigated the thermal behavior for heat treatment at various temperature in tube furnace. The formation of large particles with porous microstructure and phase change from HCP to FCC were observed on coated layer during heat treatment over $850^{circ}C$ and it reduced the corrosion resistance of coated TiAlN layers.