- 수소화 처리된 비정질 칼코게나이드 박막의 광학적 특성
- ㆍ 저자명
- 남기연,김준형,조성준,이현용,Nam. Gi-Yeon,Kim. Jun-Hyung,Cho. Sung-June,Lee. Hyun-Yong
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2006년|19권 5호|pp.450-456 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we report the changes of morphology, transmittance and photoluminescence (PL) in hydrogenated amorphous $As_{40}Ge_{10}Se_{15}S_{35}$ thin films, thermally deposited at the vapor incidence angles (${ heta}$) of $0^{circ},;45^{circ};and;80^{circ}$. The hydrogenation was carried out under the condition of a $H_2$ pressure ($P_H$) of 20 atm and an annealing temperature range, $T_{Anneal}$ of $150^{circ}C{sim}210^{circ}C$. A columnar structures with an inclination angle of approximately $65{sim}70^{circ}$ was formed in $80^{circ}$-deposited films and then the columnar was broken after hydrogenation. Transmittance increases with an increase of deposition angle and by the hydrogenation. In particular, a broad PL band on the extended region is observed in obliquely deposited films and it increases during the hydrogenation.