- RF magnetron sputter에 의해 제조된 AZO/Ag/AZO 다층박막의 Ag 두께가 전기적 광학적 특성에 미치는 영향
- ㆍ 저자명
- 안진형,강태원,김동원,김상호,An. Jin-Hyung,Kang. Tea-Won,Kim. Dong-Won,Kim. Sang-Ho
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2006년|39권 1호|pp.9-12 (4 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be $112{AA}$ for high optical transmittance and good electrical conductivity. With about $1800{AA}$ thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as $6;W/{square}$ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.