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Determination of the Depletion Depth of the Deep Depletion Charge-Coupled Devices
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  • Determination of the Depletion Depth of the Deep Depletion Charge-Coupled Devices
  • Determination of the Depletion Depth of the Deep Depletion Charge-Coupled Devices
저자명
Kim. Man-Ho
간행물명
Journal of electrical engineering & technology
권/호정보
2006년|1권 2호|pp.233-236 (4 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A 3-D numerical simulation of a buried-channel CCD (Charge Coupled Device) with a deep depletion has been performed to investigate its electrical and physical behaviors. Results are presented for a deep depletion CCD (EEV CCD12; JET-X CCD) fabricated on a high-resistivity $(1.5kOmega-cm);65{mu}m$ thick epi-layer, on a $550{mu}m$ thick p+ substrate, which is optimized for X-ray detection. Accurate predictions of the Potential minimum and barrier height of a CCD Pixel as a function of mobile electrons are found to give good charge transfer. The depletion depth approximation as a function of gate and substrate bias voltage provided average errors of less than 6%, compared with the results estimated from X-ray detection efficiency measurements. The result obtained from the transient simulation of signal charge movement is also presented based on 3-Dimensional analysis.