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Large Displacement Polymer Bimorph Actuator for Out-of-Plane Motion
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  • Large Displacement Polymer Bimorph Actuator for Out-of-Plane Motion
  • Large Displacement Polymer Bimorph Actuator for Out-of-Plane Motion
저자명
Jeung. Won-Kyu,Choi. Seog-Moon,Kim. Yong-Jun
간행물명
Journal of electrical engineering & technology
권/호정보
2006년|1권 2호|pp.263-267 (5 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.